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Views: 4 Author: Site Editor Publish Time: 2017-09-04 Origin: Site
Nowadays,sputtering targets are widely applied in semiconductor,architectural window glass for energy conservation, decorative with familiar gold-coloured hard coating.Baoji Oukai summarizes the typical material of sputtering targets in various applications.
Flat Panel Displays
Typical Materials:
Aluminium Al, Aluminium-Titanium Al-Ti, Chromium Cr, Chromium-Molybdenum Cr-Mo, Copper Cu, Copper alloy, Indium Tin oxide (ITO), Silver Ag, Tungsten W, Molybdenum Mo, Molybdenum-Tungsten Mo-W, Molybdenum-Niobium Mo-Nb, Tantalum Ta, Silicon Si.
Optical Discs
Typical Materials:
Aluminium Al, Aluminium-Titanium Al-Ti, Copper Cu, Gold Au, Silver Ag, Silicon Si, Zinc sulphide ZnS, Terbium-Iron-Cobalt Tb-Fe-Co and many other alloys.
Automotive & Architectural Glass, WEB Coating
Typical Materials:
Chromium Cr, Titanium Ti, Tin Sn, Zinc Zn, Silver Ag, Silicon Si, Silicon-Aluminium Si-Al, Nickel-Chromium Ni-Cr, Zinc-Aluminium Zn-Al, Titanium oxide TiOx
Cutting tools requiring hard wearing surfaces, corrosion resistance and reduced friction.
Typical Materials:
Chromium Cr, Titanium Ti, Titanium-Aluminium Ti-Al, Zirconium Zr, Nickel Ni, Tungsten W, Silicon Si, Silicon dioxide SiO2, Aluminium oxide Al2O3, nitrides, borides and other ceramics.
Solar Cells
Typical Materials:
Cadmium Telluride CdTe, Cadmium Selenide CdSe, Cadmium Sulphide CdS, Indium-Tin Oxide In2O3-SnO2, Silicon dioxide SiO2, Zirconium boride ZrB2, various metals and their alloys
Optical Communications
Typical Materials:
Tantalum pentoxide Ta2O5, Silicon dioxide SiO2, Tantalum Ta, Niobium Nb, Titanium Ti, Chromium Cr, Nickel Ni, Gold-Silver Au-Ag.
Magnetic Data Storage Devices
Typical Materials:
Chromium Cr, Chromium-Molybdenum Cr-Mo, Chromium-Tungsten Cr-W, Chromium-Vanadium Cr-V, Chromium-Molybdenum-Tantalum Cr-Mo-Ta, Chromium-Titanium Cr-Ti, Ruthenium Ru, Ruthenium-Alumnium Ru-Al, Cobalt-Chromium-Tantalum-Boron, Titanium Ti, Titanium-Aluminium Ti-Al, Nickel alloys, Iron-Cobalt-Boron Fe-Co-B, Iron-Tantalum-Carbon Fe-Ta-C
Semiconductors
Typical Materials:
Tantalum Ta, Ruthenium Ru, Cobalt-Iron-Boron Co-Fe-B, Tungsten-Silicon W-Si, Molybdenum-Silicon Mo-Si, Tantalum-Silicon TaSi, Titanium-Tungsten Ti-W, Tungsten W.
Electron Microscopy
Typical Materials:
Gold Au, Gold-Palladium Au-Pd, Gold-Platinum Au-Pt, Gold-Silver Au-Ag, Platinum Pt, Platinum-Palladium Pt-Pd, Platinum-Silver Pl-Ag, Silver Ag, Chromium Cr, Iron Fe, Cobalt Co, Molybdenum Mo, Carbon C