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The typical material of sputtering targets in various applications

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The typical material of sputtering targets in various applications

  Nowadays,sputtering targets are widely applied in semiconductor,architectural window glass for energy conservation, decorative with familiar gold-coloured hard coating.Baoji Oukai summarizes the typical material of sputtering targets in various applications.

  Flat Panel Displays

  Typical Materials:

  Aluminium Al, Aluminium-Titanium Al-Ti, Chromium Cr, Chromium-Molybdenum Cr-Mo, Copper Cu, Copper alloy, Indium Tin oxide (ITO), Silver Ag, Tungsten W, Molybdenum Mo, Molybdenum-Tungsten Mo-W, Molybdenum-Niobium Mo-Nb, Tantalum Ta, Silicon Si.

  Optical Discs

  Typical Materials:

  Aluminium Al, Aluminium-Titanium Al-Ti, Copper Cu, Gold Au, Silver Ag, Silicon Si, Zinc sulphide ZnS, Terbium-Iron-Cobalt Tb-Fe-Co and many other alloys.

  Automotive & Architectural Glass, WEB Coating

  Typical Materials:

  Chromium Cr, Titanium Ti, Tin Sn, Zinc Zn, Silver Ag, Silicon Si, Silicon-Aluminium Si-Al, Nickel-Chromium Ni-Cr, Zinc-Aluminium Zn-Al, Titanium oxide TiOx

  Cutting tools requiring hard wearing surfaces, corrosion resistance and reduced friction.

  Typical Materials:

  Chromium Cr, Titanium Ti, Titanium-Aluminium Ti-Al, Zirconium Zr, Nickel Ni, Tungsten W, Silicon Si, Silicon dioxide SiO2, Aluminium oxide Al2O3, nitrides, borides and other ceramics.

  Solar Cells

  Typical Materials:

  Cadmium Telluride CdTe, Cadmium Selenide CdSe, Cadmium Sulphide CdS, Indium-Tin Oxide In2O3-SnO2, Silicon dioxide SiO2, Zirconium boride ZrB2, various metals and their alloys

  Optical Communications

  Typical Materials:

  Tantalum pentoxide Ta2O5, Silicon dioxide SiO2, Tantalum Ta, Niobium Nb, Titanium Ti, Chromium Cr, Nickel Ni, Gold-Silver Au-Ag.

  Magnetic Data Storage Devices

  Typical Materials:

  Chromium Cr, Chromium-Molybdenum Cr-Mo, Chromium-Tungsten Cr-W, Chromium-Vanadium Cr-V, Chromium-Molybdenum-Tantalum Cr-Mo-Ta, Chromium-Titanium Cr-Ti, Ruthenium Ru, Ruthenium-Alumnium Ru-Al, Cobalt-Chromium-Tantalum-Boron, Titanium Ti, Titanium-Aluminium Ti-Al, Nickel alloys, Iron-Cobalt-Boron Fe-Co-B, Iron-Tantalum-Carbon Fe-Ta-C

  Semiconductors

  Typical Materials:

  Tantalum Ta, Ruthenium Ru, Cobalt-Iron-Boron Co-Fe-B, Tungsten-Silicon W-Si, Molybdenum-Silicon Mo-Si, Tantalum-Silicon TaSi, Titanium-Tungsten Ti-W, Tungsten W.

  Electron Microscopy

  Typical Materials:

  Gold Au, Gold-Palladium Au-Pd, Gold-Platinum Au-Pt, Gold-Silver Au-Ag, Platinum Pt, Platinum-Palladium Pt-Pd, Platinum-Silver Pl-Ag, Silver Ag, Chromium Cr, Iron Fe, Cobalt Co, Molybdenum Mo, Carbon C


 
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