Views: 3 Author: Site Editor Publish Time: 2017-05-02 Origin: Site
Nowadays,sputter coating has been used widely in every field,especially in SEM(Scanning Electron Microscope).What are the benefits of sputtering coating for SEM?
Sputter coating for SEM is the process of applying an ultra-thin coating of electrically-conducting metal-such as gold (Au), gold/palladium (Au/Pd), platinum (Pt), silver (Ag), chromium (Cr) or iridium (Ir) onto a non-conducting or poorly conducting specimen. Sputter coating prevents charging of the specimen, which would otherwise occur because of the accumulation of static electric fields. It also increases the amount of secondary electrons that can be detected from the surface of the specimen in the SEM and therefore increases the signal to noise ratio. Sputtered films for SEM typically have a thickness range of 2–20 nm.
Benefits for SEM samples sputtered with metal:
1. Reduced microscope beam damage
2. Increased thermal conduction
3. Reduced sample charging (increased conduction)
4.Improved secondary electron emission
5. Reduced beam penetration with improved edge resolution
6. Protects beam sensitive specimens
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