The application of Aluminium oxide thin films

　　Aluminium oxide thin films are that Aluminum reacts with oxygen in the air, creating a layer of dense Aluminum oxide thin film exposed to the surface of air.

　　Aluminium oxide thin films are widely used in many mechanical, optical and microelectronic applications because of their excellent properties, mechanical strength and hardness, transparency, high abrasion and corrosion resistance, as well as insulating and optical properties. All these properties of alumina film depend on different parameters of sputtering system such as sputtering rate, distance between the target material and substrate, pressures of reactive gases etc..