Views: 3 Author: Site Editor Publish Time: 2017-06-28 Origin: Site
(1) Density, this is the main target, good density of at least 97% or more, so we can buy target later according to the weight volume to calculate how much your target density and theoretical block density ratio, less than 90% of the return.
(2) Cracking problem, set of magnetic target is easy to crack, so we must request the use of Cu backplane, this is necessary, in addition, target should not be too thick, less than 5mm, the best. A metal target is not likely to crack, otherwise its density must be very poor.
(3) The conductivity, regarding the AZO, ITO target materials, buy back can measure how much is their conductivity, different company with powder, conductivity has the very big difference, the smaller you make to the membrane conductivity must have, the better.Otherwise you won't be able to make the resistivity you need.At present, ZnO and Al2O3 powder are used to do this, but the problem is that Al can not be mixed into ZnO, so the resistivity is not good. ITO is similar.
At present, ZnO and Al2O3 powder are mainly used together, but the problem is that Al is difficult to be doped into ZnO, so the resistivity is not good. ITO is similar.
It is suggested that the target material should not be made by itself, or that it should pay for the target material of some large companies.You're wasting your time on the one hand, and on the other hand you're so far away from the real good target material that your conditions are completely impossible.