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Binding target with backplane

Binding target with backplane couldn't make target deform, and the atoms which sputter from target can be rapidly and uniformly adhered on the substrate to form a high-quality film layer.

  • BAOJI OUKAI

Binding target with backplane couldn't make target deform, and the atoms  which sputter from  target can be rapidly and uniformly adhered on the substrate to form a high-quality film layer.

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