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Views: 7 Author: Site Editor Publish Time: 2017-07-24 Origin: Site
Magnetron sputtering has been developed rapidly and widely applied since its inception. It effectively impacts the status of other coating methods and is mainly determined by its advantages:
1. The deposition rate is fast, the substrate temperature rise is low, the damage to the film is small;
2. The films obtained by sputtering combine well with the substrate;
3. For most materials, as long as the rake material can be made, you can achieve sputtering;
4. The films obtained by sputtering have high purity, good compactness and good uniformity of film formation;
5. The thickness of the coating can be controlled accurately, and the particle size of the film can be controlled by changing the parameter condition;
6. The sputtering process has good repeatability, and the film with uniform thickness can be obtained on a large area substrate;
7. Different metals, alloys and oxides can be mixed and sputtered on the substrate;
8. Easy to achieve industrialization.